SF242-0018 - Neon recovery and reliquefication for low temperature characterization of infrared focal plane arrays

The performance of an infrared (IR) detector is the key factor in defining major quality parameters of the image data produced. The second and third generation IR detectors consist of large number of small size pixels hybridized with high performance read-out-integrated circuits (ROICs), known as focal plane arrays (FPA). Characterization of such an FPA at desired cryogenic temperature is essential for (i) the selection of the most suitable detector from a range of available candidates, and (ii) assessing their usability in the imaging system from radiometric performance point of view. Cryogen is typically used to reach cryogenic temperature in these characterizations. Liquid neon boils at 27.5 K, which is below the operation temperature of high-performance IR sensors, thus it is a near ideal cryogen for this role. However, the availability of liquid neon is limited, and its price has risen by 600% since 2014. What’s more, as semiconductor industry consumes 70% of the neon produced in the world as neon is the major gas used in the excimer pulsed lasers for deep ultraviolet lithography. Thus, a technology to recover, purify and reliquefy the consumed neon gas in the laboratories is of significance interest to both large-scale laboratories and semiconductor industry.We propose a system which can recover and reliquefy the consumed neon gas in IR detector characterization, and a purification subsystem can be added to purify laser exhaust gas mixture and then reliquefy neon gas. The production rate is expected to be ~10 liters per day and can be scaled up to produce more if needed.