SBIR/STTR Research Award

DEVELOPMENT OF AN INNOVATIVE HIGH POWERED VACUUM ULTRA VIOLET LIGHT SOURCE

Award identifier 6b13659be43ba1ab9e922bada929c2bc9fdf7e2d751b37ec75c1b4dcfe889360Awarding agency National Science Foundation

Award amount

$65,000

Program and phase

SBIR · Phase I

Award year

1994

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Award details

Awarding agency
National Science Foundation
Branch
Not reported
Recipient company
ENVIMETRICS
Proposal award date
Not reported
Contract end date
Not reported
UEI
Not reported
Solicitation number
Not reported
Topic code
Not reported

Research abstract

A HIGH POWER DENSITY (GREATER THAN 1,000 W/CC) MICROWAVE-DRIVEN PLASMA SOURCE HAS BEEN DEVELOPED, AND IT CAN POTENTIALLY BE AN EFFICIENT VACUUM ULTRA VIOLET (VUV) LIGHT SOURCE. THIS ASSESSMENT IS BASED UPON PREVIOUS SPECTROSCOPIC MEASUREMENTS AND POWER BALANCE ANALYSIS OF STEAM PLASMAS CREATED AT ATMOSPHERIC PRESSURE WITH ONLY 6 KW OF POWER. A NEW UV LIGHT SOURCE WITH HIGH POWER BELOW 200NM WHICH CAN BE POTENTIALLY APPLIED TO PHOTOLITHOGRAPHY AND SURFACE TREATMENT OF POLYMERS IS BEING DEVELOPED IN THIS RESEARCH.

Technology keywords

Not reported

Agency intelligence

National Science Foundation

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