Epitaxial Lift-Off for Superconducting Multi-Layer Advanced Electronics

The overall objective of this program is to develop a process for building high performance, superconducting single and multi-layers on the substrate of choice. The constraints imposed by the epitaxial, single crystal growth of superconducting thin films, while minimizing interdiffusion, has hindered application development. Thus, the film performance is invariable limited by the substrate in the case of microwaves, or the dielectric in the case of multi-layers. The program proposed represents a revolutionary departure from the traditional epitaxial multi-layer growth. In Phase I, we will develop a technique to detach a YBCO film from its growth substrate using novel lift-off procedures. Phase I will also study lamination of these YBCO films to low e substrates using organic polymers. The HTS/low e/HTS layer structure is the enabling technology for many different applications including multi-chip modules, interconnects and high frequency microwaves. Anticipated Benefits: The innovation is a generic and revolutionary enabling technology for high Tc electronic devices. If successful, it will result in a much improved process for device fabrication allowing optimizing structures to be made for the first time from large area films. These advances will find application in : general sensor elements such as antennas and pickup coils (for example in MRI), multi-chip modules, microwave components and integrated semiconductor/superconductor devices.