SBIR Phase I: New Coordination Complexes for the Synthesis of Nanocrystalline SrRuO3.

This Small Business Innovation Research (SBIR) Phase I project will investigate a method for making nanocrystalline strontium ruthenate (SrRuO3) using new coordination compounds. Strontium ruthenate has been identified as a replacement for pure metal electrodes in dielectric and ferroelectric thin-film devices. For these devices, there will be a need for high-density SrRuO3. Strontium ruthenate powder made by traditional solid-state synthetic techniques does not sinter sufficiently owing to the powder's large particle size. To achieve higher densities, nanocrystalline SrRuO3 is needed. Reducing the particle size generally reduces the densification temperature making it easier to achieve a high-density material. Chemical routes to produce nanocrystalline SrRuO3 will be used. Coordination compounds will be identified for use as precursors. At the conclusion of Phase I, a precursor will be identified that allows for the production of nanocrystalline SrRuO3. Nanocrystalline SrRuO3 will be needed to make high-density sputtering targets that will be used to make thin-film electrodes in the next generation of high capacity stack storage capacitors memory devices.