MEMS IR Sensor

This proposal addresses the fabrication of a novel uncolled IR detector array having significant spectrum coverage, size, weight, speed , and cost advantages over the current ones. The innovation is based on the utilization of micromechanical-system(MEMS) of high figures of merits and Si monolithic integration compatibility. The proposed simple MEMS photon detector structure allows both electrical and optical read-out design. Optical read-out is an attractive alternative to uncooled IR imagers,which potentially eliminates the major drawback of electronic means that inevitably introduce additional thermal loss to the signal due to the contact made to the detector element. Based on a Phase I feasibility demonstration, we propose to furtherdevelop this new technology realizing commercial products. The proposed Phase II work is in collaboration with Rockwell Science Center, a leading IR imager producer, and with VC matching funding. Success in the Phase II effort will indentify a viablemanufacturing route for advanced uncooled IR imaging array fabrication. These devices have a wide range of