SBIR/STTR Research Award
FERROELECTRIC HETEROSTRUCTURES FOR HIGH-DENSITY DRAMS
Award amount
$59,806Program and phase
SBIR · Phase IAward year
1994Award details
- Awarding agency
- Department of Defense
- Branch
- Missile Defense Agency
- Recipient company
- ADVANCED FUEL RESEARCH, INC.
- Proposal award date
- Not reported
- Contract end date
- Not reported
- UEI
- E7PVK58C6UJ5
- Solicitation number
- Not reported
- Topic code
- Not reported
Research abstract
The innovations of the proposed program are: 1) advancing thin-film deposition technology to achieve fully epitaxial growth of ferroelectric heterostructures on silicon substrates, by using the highly successful pulsed laser deposition (PLD) technique; 2) replacing the Pt bottom electrode with the epitaxial conductive oxide material; 3) achieving a full monolithic integration of high-density ferroelectric/conductive oxide capacitors with Si integrated circuits (ICs). The main thrust of Phase I will be to demonstrate the feasibility of epitaxial growth of a novel ferroelectric heterostructure, on top of an epitaxial YSZ buffered silicon substrate.
Technology keywords
Not reported
Other awards by this recipient
Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.
- Advanced Multipollutant Trace Contaminant Sorbents for the Exploration Portable Life Support System
- Advanced Multipollutant Trace Contaminant Sorbents for the Exploration Portable Life Support System
- A Web-Based Kinetics Modeling Toolbox (KMT) for Biomass Thermal Conversion Processes
- Benchtop Instrument for Measuring High Temperature Surface Emissivity (CRP)
- Innovative, Rapidly Regenerable, Structured Trace-Contaminant Sorbents Fabricated Using 3D Printing
Research funding history
248 SBIR/STTR records share this UEI (1983–2021). Reported award amounts total $48,007,871. Reported amounts are not federal obligations.
Phases: Phase I, Phase II
Agencies: Department of Defense, Department of Energy, National Science Foundation, National Aeronautics and Space Administration, Environmental Protection Agency, Department of Commerce