Micro Disk Systems for Inertial Sensing and Optical Beam Control

Sarcos is currently developing a technology that can lead to low-cost millimeter-scale gyroscopes, multi axis inertial sensors, and very compact laser scanning devices. This technology, called Micro Disk Systems (MDS), is based on levitating a small disk above a VLSI substrate using electrostatic fields. AC stabilization of the fields ensures that the disk position remains suitable, and field-based sensors measure the spatial position of the disk. In a previous contract, we constructed a proof of principle prototype and demonstrated the feasibility of MDS technology. In Phase I, we will design an evaluation system that will address two immediate applications of this technology: 1)inertial sensors (a few millimeters on a side) that determine acceleration magnitude and direction, and 2) a very small laser scanner which can steer an incoming beam. Phase II will focus on construction and testing of the evaluation system, and Phase III will emphasize commercial development.