SBIR Phase I: Photon Enhanced SEM Platform for Nano-Manufacturing

This Small Business Innovation Research Phase I project will demonstrate the scientific and technical feasibility of introducing optical processing into conventional scanning electron microscopes (SEM). The addition of localized and site specific high photon flux offers the opportunity to enable a variety of novel patterned materials processing options in these tools, including enhanced deposition and etch processes at the nanometer scale. The broader impact of this project opens up a broad array of new applications in areas such as biology, medicine and nanotechnology.