SBIR/STTR Research Award
SBIR Phase I: Piezo-Driven Inertial Stages for UHV
Award amount
$99,999Program and phase
SBIR · Phase IAward year
2003Award details
- Awarding agency
- National Science Foundation
- Branch
- Not reported
- Recipient company
- DYNAMIC STRUCTURES AND MATERIALS, LLC
- Proposal award date
- Not reported
- Contract end date
- Not reported
- UEI
- M5ETGFJGNSW7
- Solicitation number
- Not reported
- Topic code
- Not reported
Research abstract
This Small Business Innovation Research Phase I project will develop a piezoelectric motor-drive with Ultra-High-Vacuum (UHV) compatibility for high-speed driving of positioning platforms. The proposed piezoelectric motor-drive will provide an as-yet unrealized combination of several desirable characteristics: nanometer and sub-nanometer precision; speeds in excess of 500 mm/s; drive capacities in the range of 10's of kilograms; and, ranges of travel in excess of 500 mm.
The commercial potential of this concept will provide a revolutionary means for rapid and accurate materials handling for fabrication, inspection, metrology, and packaging of microparts and microsystems.
Technology keywords
Not reported
Other awards by this recipient
Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.
- High-Capacity Balance with Tailored Compliance
- Actuators for Direct Fire Precision Munitions
- High Bandwidth Hexapod for Hypersonic Flight Simulation
- Flight Tested Integrated Guidance Electronics Package
- High Bandwidth Hexapod for Hypersonic Flight Simulation
Research funding history
49 SBIR/STTR records share this UEI (1999–2025). Reported award amounts total $16,844,749. Reported amounts are not federal obligations.
Phases: Phase I, Phase II, Phase II – Direct to Phase II
Agencies: Department of Defense, National Aeronautics and Space Administration, National Science Foundation