MEMS Variable Capacitor Arrays for Tunable Filters

TMS Technologies (TMS) proposes a Phase I program to study the feasibility of a high power tunable filter based on an array of micromechanical variable capacitors. By applying a voltage to the micromechanical element, we can vary the total capacitance seen by the input signal (transmitter rf), and thus achieve a tunable filter when merged with external components such as inductors. Most importantly, we can fabricated a large array of the variable capacitors in parallel with the same inductive element to form a high power, tunable bandpass filter. The MEMS variable capacitor is, in essence, the analog of the semiconductor variable capacitor, with an air gap to provide increased resistance to breakdown at little or no loss in switching speed, transmission characteristics, and package size. This proposed SBIR program will create a new methodology for filtering of high power RF transmitters utilizing filters of substantially smaller size and weight, in both military and commercial applications