Wavelength Dispersive Fluorescence Detectors in Soft X-ray Region

A wavelength dispersive x-ray fluorescence detector working in soft x-ray region has been proposed based on the diffraction principles. The detector uses graded multilayers as analyzers and large area detectors for data collection to achieve good energy resolution and to avoid count rate problems encountered by solid state detectors. Furthermore, the detector will be tunable in a wide energy region and easy to operate. Testing results obtained in Phase 1 indicate that the detector will have a throughput between 20 to 30%, and a bandwidth of 3-4%. In the Phase 2 project, we will design and fabricate the multilayer array analyzer/detectors with large solid angle, which will be optimized in two energy regions: 500 to 1000 eV, and 1000 eV to 2000 eV. The detectors will be evaluated for their performance, and will be marketed as a generally used soft x-ray fluorescence detector for x-ray spectroscopy, fluorescence analysis, and imaging experiments.