X-Ray Sensors for Real Time Control of Thin Film Deposition

Intelligent materials processing requires sensors that can assess materials properties in situ and in real time at the microscopic level. Data from these sensors would be used to control processing in near real time, to accelerate development of new materials systems, and to enable the development of a virtual materials processing environment, a goal that will greatly reduce both the cost and time needed to develop new materials systems. Few sensors currently exist that can provide the kind of information needed. X-ray sensors offer a vast improvement over current in situ sensor techniques. Recent advances in high energy high resolution x-ray generators coupled with modern advanced photo detecting systems have made real-time data acquisition during Physical Vapor Deposition (PVD) a laboratory reality.During Phase I effort, the feasibility of x-ray sensors for in situ, real-time process control of magnetron sputter deposition of thin films will be demonstrated. This will be achieved by delineating relationships between microscopic film properties and deposition conditions. In addition, one design will be prepared to adapt appropriate sensors for measuring x-ray reflectivity and fluorescence to in situ measurements, and a second design for a heated sample stage and goniomete will be developed.