SBIR Phase II: Particle Metrology and Diagnostics using Microchannel Resonators

This Small Business Innovation Research (SBIR) Phase II program develops an instrument capable of measuring micron-scale particles using their weight as the measured parameter. At the instrument's core is a novel microfabricated sensor containing a vibrating microchannel. The target particles are suspended in fluid as they pass through the channel, causing channel vibration frequency to change with a sensitivity of less than a picogram. The broader impact of this research will to provide a method for particle size analysis that in addition to size gives mass. Manufacturing processes in many industries could benefit from this type of instrument to improve their processes and thereby lower production costs as well as improving product quality when used in a quality assurance program.