SBIR/STTR Research Award
IMPURITY CONCENTRATIONS ON GAAS(100)
Award amount
$50,000Program and phase
SBIR · Phase IAward year
1986Award details
- Awarding agency
- Department of Defense
- Branch
- Defense Advanced Research Projects Agency
- Recipient company
- IONWERKS INC
- Proposal award date
- Not reported
- Contract end date
- Not reported
- UEI
- XFHSJJLN7ZQ7
- Solicitation number
- Not reported
- Topic code
- Not reported
Research abstract
DETERMINATION OF THE SURFACE STOICHIOMETRY OF SEMICONDUCTOR SURFACES DURING PROCESSING BY MBE OR CVD IS DESIREABLE. DIRECT RECOIL SPECTROSCOPY (DRS) MAY OVERCOME THE LIMITATIONS INHERENT IN CONVENTIONAL SURFACE ANALYSIS SO THAT ANALYSIS OF GAAS SURFACES SIMULTANEOUSLY FOR H, C, O, N, AL, SI, FE, ZN, GA, AND AS WILL BE POSSIBLE ON SUBSECOND TIME SCALES AT MODERATE PRESSURE (10(-2) TORR). AZIMUTHAL SCANS OF THE SINGLE CRYSTAL SUBSTRATE COUPLED WITH BLOCKING AND SHADOWING ANALYSIS WILL PROVIDE DOPANT AND IMPURITY SURFACE POSITION. DRS WILL BE USED AS A REAL TIME MONITOR OF AL DEPOSITION ON GAAS.
Technology keywords
Not reported
Other awards by this recipient
Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.
- Nanoparticulate Coatings Enhance Ion Detection
- Diode lasers and Small Nanoparticulate Matrices Combine to Elevate Sensitivity of MILDI-MSI
- Miniature Recoil Ion Mass Spectrometer enables correlative elemental isotopic and backscatter analysis from solid nanovolumes
- Nanoparticulate Coatings Enhance Ion Detection
- Gas Phase Synthesis and Implantation of Metastable Intermolecular Compounds (MICs)
Research funding history
65 SBIR/STTR records share this UEI (1986–2021). Reported award amounts total $17,405,049. Reported amounts are not federal obligations.
Phases: Phase I, Phase II
Agencies: Department of Health and Human Services, Department of Defense, National Aeronautics and Space Administration, Department of Energy, National Science Foundation