Feasibility of a MEMS-based Power Microswitch

The Phase I proposal addresses the feasibility of forming a power microswitch using micro-electromechanical systems (MEMS) technology. The principle of operation is based on the use of Ni surface micro-machining, combined with surface hardening approaches for long life. During Phase I we will investigate design and feasibility aspects of such switches. Phase II would involve research and development of a working demonstration. The resulting technology would be especially useful in high temperature, radiation-hard electronics and power svstems. The proposed switch can be used in applications requiring low sensitivity to temperature, light, radiation, and other envirnnmental effects.