FEASIBILITY OF MOCVD FOR DEPOSITION OF ELECTROLUMINESCENT FILMS FOR MULTICOLOR FLAT PANEL DISPLAYS

METALORGANIC CHEMICAL VAPOR DEPOSITION (MOCVD) IS PROPOSED AS A NEW TECHNIQUE FOR PREPARING ELECTROLUMINESCENT (EL) FILMS BASED ON II-VI HOST MATERIALS. MONOCHROME YELLOW EL DISPLAYS ARE BASED ON MANGANESEDOPED ZINC SULFIDE ACTIVE LAYERS. RED, GREEN, AND BLUE LIGHT-EMITTING EL FILMS HAVE BEEN PREPARED USING BOTH ZINC SULFIDE AND ALKALINE EARTH SULFIDE HOSTS. CURRENTLY, MULTI-COLOR PANELS ARE LOWER IN BRIGHTNESS AND REQUIRE HIGH PROCESSING TEMPERATURES. MOCVD SHOWS PROMISE FOR GROWING HIGH QUALITY CRYSTALLINE LAYERS OFII-VI MATERIALS AT MODERATE SUBSTRATE TEMPERATURES. ZNS:MN FILMS WILL BE PREPARED BY THE MOCVD TECHNIQUE. BRIGHTNESS AND EFFICIENCY OF ACTFEL DEVICES WILL BE COMPARED WITH THOSE FABRICATED BY CONVENTIONAL DEPOSITION TECHNIQUES. THEFEASIBILITY OF EMPLOYING MOCVD TO GROW REFRACTORY ALKALINE EARTH SULFIDE HOSTS WILL BE EVALUATED FOLLOWING AN INVESTIGATION OF POSSIBLE METALORGANIC SOURCE MATERIALS.