SBIR/STTR Research Award

Novel Doping Sources for III-V Molecular Beam Epitaxy

Award identifier 8b3230c7c6b28d28b440fdcff1d87763ac3d6c3f2767f8d344d1c11aedc4b741Awarding agency Department of Defense · Air Force

Award amount

$293,215

Program and phase

SBIR · Phase II

Award year

1993

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Award details

Awarding agency
Department of Defense
Branch
Air Force
Recipient company
Essential Research, Inc.
Proposal award date
Not reported
Contract end date
Not reported
UEI
Not reported
Solicitation number
Not reported
Topic code
Not reported

Research abstract

The developement of four different doping sources for use within an MBE system is proposed. Two high purity, high uniformity sources for use with Carbon, and two such sources will be developed for use with Tellurium. The purity of the species produced by each cell will be studied with a Residual Gas Analyzer. Recommendations concerning the use of these cells in a solid source MBE system will be summarized in the final report.

Technology keywords

Not reported

Agency intelligence

Department of Defense

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