SBIR/STTR Research Award

Imaging Variable Kinetic Energy Electron Analyzer

Award identifier cf9c3d9d5f63d6fcd61aa387bc3b41c52d01f36286fd8c4d7743fb41eb549867Awarding agency Department of Commerce · National Institute of Standards and Technology

Award amount

$299,968

Program and phase

SBIR · Phase II

Award year

2007

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Award details

Awarding agency
Department of Commerce
Branch
National Institute of Standards and Technology
Recipient company
R. Browning Consultants
Proposal award date
Not reported
Contract end date
Not reported
UEI
Not reported
Solicitation number
Not reported
Topic code
Not reported

Research abstract

The objective of this proposal is to create a prototype imaging variable kinetic energy electron analyzer in the range 0.1 to 8 keV for use with an X-ray excitation source. The imaging analyzer is to have a target imaging spatial resolution of 100 nm. The X-ray excitation source will be a synchrotron light source. The instrument can be described as an X-ray photoelectron spectroscopy (XPS) microscope XPM. The microscope will use a magnetic immersion projection lens and an electrostatic hemispherical electron analyzer. The images the microscope will produce will be multidimensional spectrographic images. A second objective of this proposal is to further develop the new class of electron microscope invented in the Phase 1 work program. The new class of microscope can combine high spatial resolution and time resolved imaging.

Technology keywords

Not reported

Agency intelligence

Department of Commerce

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