Integrated Micromechanical Sensors for Smart Sonar Systems

Improvements in submarine stealth have necessitated development of improved sonar systems. The requirements of these systems suggest the need for a novel sensor technology which can simultaneously satisfy the demands of smaller size, lower cost, greater versatility, and enhanced performance. The new technology of microelectromechanical systems (MEMS) may offer an ideal solution to sonar needs. High performance mechanical sensor devices can be fabricated in large element arrays along with integrated signal conditioning circuitry, thereby creating a "smart" sonar system substantially beyond the current state of the art.