SBIR/STTR Research Award
MICROSTRUCTURE IN FERROELECTRIC MATERIALS
Award amount
$1,500,000Program and phase
SBIR · Phase IIAward year
1996Award details
- Awarding agency
- Department of Defense
- Branch
- Missile Defense Agency
- Recipient company
- Deacon Research
- Proposal award date
- Not reported
- Contract end date
- Not reported
- UEI
- Not reported
- Solicitation number
- Not reported
- Topic code
- Not reported
Research abstract
A new technology for microfabrication is proposed. The technology offers a cost-effective way to produce mcirostructures in piezoelectric or dielectric materials, including the microstructures with high aspect ratios. These microstructures have the potential to fill critical needs in ultrasonic technology, chemical sensors, electronics and optics. In Phase I, we will fabricate selected microstructures whose geometry is representative of specific application areas, characterize the performance of the fabrication process, and start the work on optimization of process parameters, which will continue into Phase II.
Technology keywords
Not reported