Nanotubes as Nanoprobes for Advanced Device Processing

The value and potential of establishing a physical connection between the macroscopic world and individual nanometer scale domains has increasingly become evident since the invention of the scanning tunneling microscope (STM). Despite the numerous developments that have made STM ever functional, a key technology gap has remained-namely, the design and definition of probe tip. To fill this gap, this effort aims to develop nanotube probes and probe arrays using a proprietary technology. Phase I will demonstrate the proof-of-concept and its usefulness to nanoelectronic device processing. Phase II will build on Phase I success, optimize, build prototypes, implement and qualify the technology. Phase III will commercialize the technology and anticipated spin-offs.