A Micromachined Hard Target Penetration Accelerometer Using a Metal-Glass Alloy

Silicon Designs has developed a low G accelerometer technology using micromachined sense elements. In this project we propose to develop a family of high-G, shock survivable accelerometers for hard target fuzing. Our goal is to develop sense elements that will withstand the 100,000 g pea accelerations that occur during initial target penetration and return quickly to linear operation to measure much lower accelerations. In Phase I we propose to build and test shock survivable sense elements. Using these sense elements with an ASIC circuit in Phase II, we will build complete accelerometers suitable for surviving high shock environments, which we will test and provide to Eglin for additional testing. We also in Phase II will build engineering models of 3-axis accelerometers package in a form suitable for use in a hard target fuze.