Low-Loss Packaged Ka-Band (26.5 GHz) MEMS Phase Shifter

We propose to design, model and characterize a novel, packaged four-bit Ka-band (26.5 GHz) phase shifter employing ultra-low-loss ohmic contact RF MEMS switches. The novelty of this project lies in its use of an innovative package design, wherein the phase shifter is fabricated monolithically with the package underside, yielding an ultra-small surface-mountable device. This leads to a reliable, high bandwidth component. Target specifications for the packaged phase shifter chip are: 3.2 dB average insertion loss, 33 dBm continuous RF power handling, and <10 microseconds switching time. The result of this six-month Phase I project will be a proven design supported by modeling and characterization results, pointing the way to high-yield fabrication and assembly of actual packaged phase shifter chips for an antenna beam steering demonstration in Phase II. Topic E2.04 specifically identifies low loss MEMS based RF switches under Component Technology required products.