Micro Electro Mechanical System (MEMS) Scale Deposited Energetic

The description and characterization of a novel, low firing energy, semiconductor based, scaleable monolithic electro-explosive device (EED) is presented. The structure employs laminations of thin layers of metallic and nonmetallic elements or inorganiccompounds that react exothermically under suitable excitation. The laminations can be selectively deposited in the shape of a bridge to form a bowtie-shaped igniter. This structure produces a thermal output that can jump an airgap in excess of 100 milsand initiate powder, making it possible to employ mechanical shutters for safing.The laminations can also be used to coat the inside of a micro-machined cavity. The micro-machined cavity with the laminated material can thereby act as a miniature shaped-charge. The focused plasma and particle output of the shaped charge can be used fora variety of purposes such as perforating a thin metal foil. The structures can fabricated with conventional microelectronic techniques which allow for very economical manufacturing.The proposed devices will provide more vigorous output than conventional semiconductor bridge initiators without a penalty in cost or safety. These devices promise to provide safer more reliable initiation for blasting, automotive airbags, tactical weaponsystems and aerospace ordnance devices.