Integrated Micromachined Angular Rate Sensor

We propose a solid-state angular based microelectromechanical systems (MEMS) technology. The rate sensor utilizes a tuning fork resonator design with control and readout electronics integrated on the dame chip as the sensor. The sensor will be designed to operate at high spin rates (300 rev/sec) with high accuracy for smart munitions, as well as potential commercial applications. The sensor is inherently small, lightweight, and consumes little power. Since it can be batch fabricated using integrated circuit processing techniques, it can be manufactured in large volumes at low cost. We propose to develop the sensor in collaboration with Analog Devices Incorporated, using their established state-of-the-art integrated MEMS fabrication process which combines BiCMOS electronics with polysilicon surface micromachined mechanical elements. Designing the sensor using an existing manufacturing processs will reduce the technical risk, cost, and time of the development, and naturally leads to commercial manufacturing in high volumes subsequent to the development.