An Imaging Micro-X-ray Spectrometer

This project will develop an Imaging Micro-X-Ray Spectrometer for use at DOE facilities concerned with materials characterization. The spectrometer will produce x-ray elemental images of microscopic features on samples. With this device, a user could image a micro-circuit and see the copper interconnects as one color, the underlying silicon as another color, and contaminants as yet a third color. Shallow subsurface features also could be viewed by using more-penetrating x-ray energies. With geological samples, the distribution of elements in a sample could easily be seen. This stand-alone device will minimize sample preparation. Instead of raster scanning the x-ray beam, an X-ray spectral image of the sample will be produced using Wolter I x-ray optics to project an image onto an energy-dispersive CCD array. Commercial Applications and other Benefits as described by the awardee: In future applications, this device would enable the three-dimensional elemental tomography of tiny samples, such as cells or mineralogical grains. Another application may include the production of 3-D elemental maps of micro-circuits, without disassembling them.