SBIR/STTR Research Award
Point of Use Generation of Hydrogen Selenide for Electronic Device Fabrication
Award amount
$59,853Program and phase
SBIR · Phase IAward year
1994Award details
- Awarding agency
- Department of Defense
- Branch
- Defense Advanced Research Projects Agency
- Recipient company
- Electron Transfer Tech
- Proposal award date
- Not reported
- Contract end date
- Not reported
- UEI
- Not reported
- Solicitation number
- Not reported
- Topic code
- Not reported
Research abstract
A point of use generator for hydrogram selenide (H2Se) gas production is proposed. The generator would greatly decrease the safety risk of wafer fabrication with the toxic gas while providing higher purity gas than is now available for semiconductor fabrication. Anticipated Benefits: The H2Se generator would find applications in the production of ZnSe light emitting diodes, CdSe and CdInSe optoelectronic devices, and as a Se doping source for diamond thin films.
Technology keywords
Not reported