SBIR/STTR Research Award
Imaging Variable Kinetic Energy Electron Analyzer
Award amount
$74,909Program and phase
SBIR · Phase IAward year
2006Award details
- Awarding agency
- Department of Commerce
- Branch
- National Institute of Standards and Technology
- Recipient company
- R. Browning Consultants
- Proposal award date
- Not reported
- Contract end date
- Not reported
- UEI
- Not reported
- Solicitation number
- Not reported
- Topic code
- Not reported
Research abstract
The objective of this proposal is to create a prototype imaging variable kinetic energy electron analyzer in the range 0.1 to 8 keV for use with an X-ray excitation source. The imaging analyzer is to have a target imaging spatial resolution of 100 nm. The X-ray excitation source will be a synchrotron light source. The instrument can be described as an X-ray photoelectron spectroscopy (XPS) microscope XPM. The microscope will use a magnetic immersion projection lens and an electrostatic hemispherical electron analyzer. COMMERCIAL APPLICATIONS: XPS microanalysis could prove to be a significant analysis tool in the investigation of techniques for sub-micron semiconductor device physics, materials science, and nanoscale devices. Current XPS imaging systems are bulky and expensive. The tool proposed here could have widespread acceptance as a routing tool for microanalysis.
Technology keywords
Not reported