MEASUREMENT OF UPPER MID FREQUENCY ERRORS ON ARBITRARY GRAZING INCIDENCE OPTICS

THIS PROJECT ADDRESSES THE PROBLEM OF MEASURING UPPER MID FREQUENCY ERRORS (THOSE WITH PERIODS FROM 0.5 TO 5 MM) ON GRAZING INCIDENCE OPTICS. THESE ERRORS, EVEN WITH AMPLITUDES OF 5 TO 50 ANGSTROMS RMS, HAVE A SERIOUS IMPACT ON SCATTER IN GRAZING INCIDENCE EXTREME ULTRA VIOLET (EUV) AND X-RAY SYSTEMS. CURRENT MEASUREMENT TECHNIQUES ARE LIMITED IN THEIR SPATIAL FREQUENCY BANDPASS, THEIR ABILITY TO ALLOW FOR SMALL RADII OF CURVATURE COMMON PARTICULARLY INEUV OPTICS, OR BOTH. WE WILL INVESTIGATE A NEW NON-CONTACT TECHNIQUE WHICH OFFERS ANGSTROM LEVEL ACCURACY OVER THE REQUIRED SPATIAL FREQUENCY BANDPASS, HIGH IMMUNITY TO VIBRATION AND DRIFTS, UNDEGRADED ACCURACY OVER A VERY WIDE RANGE OF CONVEX AND CONCAVE CURVATURES, AND THE ABILITY TO MEASURE SURFACES WITH DIFFERENT CURVATURES WITHOUT RECONFIGURING THE INSTRUMENT. IN PHASE I, WE WILL PERFORM ACOMPLETE SYSTEMS ANALYSIS, INCLUDING OPTICAL DESIGN OPTIMIZATION, DETECTOR ANALYSIS AND SELECTION, SIGNAL TO NOISE ANALYSIS, ELECTRONIC DESIGN AND ANALYSIS (INCLUDING COMPUTER INTERFACE DEFINITION), AND SYSTEM PERFORMANCE PREDICTION. THE RESULTS WILL BE A BASELINE INSTRUMENT DESIGN AND A DETAILED PERFORMANCE PREDICTION, PAVING THE WAYFOR A PHASE II PROJECT FOR DETAILED DESIGN, AND THE BUILDINGAND CHARACTERIZATION OF A PROTOTYPE INSTRUMENT.