NOVEL MICROCHANNEL PLATES FOR CHARGE-COUPLED DEVICE INTENSIFICATION

WE PROPOSE TO DEVELOP A TUBE INTENSIFIER THAT HAS A RESOLUTION APPROPRIATE TO 1024X1024 AND 2048X2048 PIXEL CHARGE COUPLED DETECTORS. THIS INTENSIFIER WILL BE MADE POSSIBLE BY THE DEVELOPMENT OF A NOVEL-DESIGN MICROCHANNEL PLATE. THE MICROCHANNELS ARE TO BE DELINEATED WITH MICROLITHOGRAPHIC PATTERNING OF AN INSULATING SUBSTRATE. THE MICROCHANNELS ARE THEN MICROFABRICATED BY THE USE OF ANISOTROPIC ETCHING. SUCH MICROCHANNEL PLATES WILL HAVE THEIR CHANNELS SPACED REGULARLY. THEY CAN BE STACKED IN Z OR CHEVRON CONFIGURATIONS WITHOUT ANY LOSS OF IMAGE RESOLUTION. THE SAME TECHNOLOGY WILL BE APPLICABLE TO THE MANUFACTURE OF MICROCHANNEL ARRAYS WITH OPTIMAL CHANNEL SIZES AND ASPECT RATIOS. THESE MICROCHANNEL ARRAYS CAN BE EMPLOYED AS RESOLUTION-CONSERVING OUTPUT BUFFERS BETWEEN THE LAST MICROCHANNEL AND THE PHOSPHOR. THE RESEARCH WILL DETERMINE THE POSSIBLE MINIMUM FEATURE SIZE AND ASPECT RATIOS OF OTHER MICROCHANNELS. THE REST OF THE RESEARCH EFFORT WILL CONCENTRATE ON ESTIMATING THE SPATIAL RESOLUTION OF AN IMAGE INTENSIFIER TUBE MANUFACTURED WITH THE NOVEL MICROCHANNEL PLATES. ANTICIPATED BENEFITS/POTENTIAL COMMERCIAL APPLICATION - HIGH-RESOLUTION IMAGE INTENSIFIERS FOR ASTRONOMY, REMOTE SATELLITE SENSING, AND ROBOTIC DETECTION.