SBIR/STTR Research Award

FABRICATION OF SILICON SHEET FOR ELECTRONIC CIRCUIT APPLICATION

Award identifier f503409a2fa6f1b13ab4f3a8c7826e1e8b80d1089df1947a7608193ee4e73e9cAwarding agency National Science Foundation

Award amount

$64,920

Program and phase

SBIR · Phase I

Award year

1994

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Award details

Awarding agency
National Science Foundation
Branch
Not reported
Recipient company
CREARE LLC
Proposal award date
Not reported
Contract end date
Not reported
UEI
JDKYAKDT4TT6
Solicitation number
Not reported
Topic code
Not reported

Research abstract

SINGLE CRYSTAL SILICON WAFERS ARE ESSENTIAL FOR INTEGRATED CIRCUIT (IC) MANUFACTURING. RESEARCHERS ARE DEVELOPING A METHOD TO FABRICATE THESE WAFERS DIRECTLY IN SHEET FORM IN CONTRAST TO CYLINDRICAL BOULES CURRENTLY UTILIZED. THE TECHNIQUE REDUCES THE COMPLEXITY AND COST OF THE CRYSTAL GROWTH HARDWARE. WAFER SLICING FROM THE BOULE IS ELIMINATED ALONG WITH THE ASSOCIATED KERF LOSS; AND FABRICATION IN SHEET FORM ALTERS THE BASIC THERMAL TRANSPORT OF THE CRYSTAL GROWTH SO THAT SCALE-UP TO LARGER SIZES CAN BE MORE STRAIGHTFORWARDLY ACCOMPLISHED. THE RESEARCH OBJECTIVE IS TO OBTAIN A FINAL WAFER PRODUCT WHICH IS EQUAL OR SUPERIOR TO CURRENT WAFERS. THERE CURRENTLY IS NO DOMESTIC VENDOR OF SILICON WAFERS TO SUPPLY THE DOMESTIC IC FABRICATION INDUSTRIES. THIS PUTS THE U.S. IC INDUSTRY AT SEVERE JEOPARDY VIS-A-VIS EXPORT CONTROL FROM FOREIGN SUPPLIERS. THIS RESEARCH WOULD PROMOTE THE RETURN OF SILICON WAFER MANUFACTURING TO THE DOMESTIC UNITED STATES MARKETPLACE.

Technology keywords

Not reported

Research funding history

1,365 SBIR/STTR records share this UEI (1983–2026). Reported award amounts total $507,020,394. Reported amounts are not federal obligations.

Phases: Phase I, Phase II, Phase II – Direct to Phase II

Agencies: Department of Defense, National Aeronautics and Space Administration, Department of Health and Human Services, Department of Energy, Department of Transportation, Department of Commerce

Agency intelligence

National Science Foundation

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