SBIR/STTR Research Award
AND L-BAND FET
Award amount
$48,570Program and phase
SBIR · Phase IAward year
1986Award details
- Awarding agency
- Department of Defense
- Branch
- Navy
- Recipient company
- Lehrer-pearson Inc.
- Proposal award date
- Not reported
- Contract end date
- Not reported
- UEI
- Not reported
- Solicitation number
- Not reported
- Topic code
- Not reported
Research abstract
VHSIC INTEGRATED CIRCUITRY CAN BE MADE WITH BETTER REPEATABILITY BETTER YIELD AND LOWER COST USING GAAS WAFERS WITH BETTER FLATTNESS, PARALLELISM AND REDUCED CRYSTAL DAMAGE. MICROMACHINING IS A PROMISING WAFER FABRICATION PROCESS TO ACHIEVE THE DESIRED VHSIC INTEGRATED CIRCUITRY IMPROVEMENTS.
Technology keywords
Not reported