SBIR/STTR Research Award
A LASER SURFACE PROFILOMETER FOR STEEP ASPHERIC SURFACES
Award amount
$496,452Program and phase
SBIR · Phase IIAward year
1989Award details
- Awarding agency
- Department of Energy
- Branch
- Not reported
- Recipient company
- Optra, Inc.
- Proposal award date
- Not reported
- Contract end date
- Not reported
- UEI
- RRLMP7RT1483
- Solicitation number
- Not reported
- Topic code
- Not reported
Research abstract
THE DEVELOPMENT OF AN INTERFEROMETRIC SURFACE PROFILOMETER IS PLANNED. KEY PHASE I PERFORMANCE SPECIFICATIONS INCLUDE PRECISION AND RESOLUTION FOR STEEP ASPHERIC SURFACES OF 2.5NM IN SURFACE HEIGHT MEASUREMENT, A SPATIAL RESOLUTION OF 0.2MM, AND THE ABILITY TO HANDLE SURFACE SLOPES IN THE RANGE 25 DEGREES WITH A LINEAR TRADE-OFF BETWEEN THESE TWO PARAMETERS. DURING PHASEII IT IS ANTICIPATED THAT PERISCOPIC OPTICS WILL BE DEVELOPED (TO INSPECT THE INTERIOR OF CYLINDRICAL SURFACES) AND THAT IMPROVEMENTS IN SPATIAL RESOLUTION MAY BE ACHIEVED. THE PROPOSED INSTRUMENT IS BASED ON THE USE OF A TWO-FREQUENCY HENE LASER, AND IS AN EVOLUTION FROM A BREADBOARD INSTRUMENT THAT HAS EXHIBITED SUBNANOMETER HEIGHTRESOLUTION AND 2 MICRON SPATIAL RESOLUTION.
Technology keywords
Not reported
Other awards by this recipient
Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.
- Multi-Spectral Flickerless DMD-Based Scene Projector
- Laser Exposure Measurement Device
- New Lamellar Grating Interferometer for Spectroscopy
- Tunable Liquid Crystal Grating Filter
- Multi-Configuration Matched Spectral Filter Core
Research funding history
136 SBIR/STTR records share this UEI (1983–2015). Reported award amounts total $26,651,322. Reported amounts are not federal obligations.
Phases: Phase I, Phase II
Agencies: Department of Defense, National Aeronautics and Space Administration, Department of Energy, Department of Health and Human Services, Department of Commerce, National Science Foundation