Automated Defect Analysis Using a Doma Scatterometer and Image Analysis

We will model the optical scatter produced by different shapes and concentrations of defects using scalar diffraction theory. We will develop image processing techniques which can be used to supply features to analysis routines using the model data and determine the ability of the technique to predict the shape and concentration of defects. We will assemble a dome scatterometer, examine samples of material which have defects similar in shape and density as those which have been modeled, and determine the ability of the image processing techniques to predict defect properties using real samples. Based on the level of success achieved, we will determine modifications necessary for the image processing and analysis techniques and for the dome scatterometer. These changes and an improved dome scatterometer will be implemented in a Phase I effort.