SBIR Phase I: A Detector for Co-Axial Micro-focused Ion Beams for Detection of Backscattered Ions and Secondary Electrons from semi-conducting surfaces

This Small Business Innovation Research Phase I project is to develop a secondary electron detector which can be co-axially mounted with a micro-focused ion beam. Backscattered neutral atoms (and ions) and secondary electrons will be analyzed to give a measure both of surface element location and identity. This detector will enable unique types of secondary ion mass spectrometry. The electrons and negative backscattered ions can be energy and time analyzed to give a spatially resolved elemental image of the surface under examination. Beam damage is greatly reduced compared to secondary electron microscopy allowing its use on biological samples. This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5).