Silicon Carbide Microsensor with Piezoresistive Diamond Sensing Elements

Currently, there exist no pressure sensors which are able to withstand operating temperatures in excess of 500 degrees Celsius. Such pressure measurements are critical for proper control of operating parameters in aeronautical propulsion systems, rockets and materials processing. Silicon pressure transducers, which have found extensive use in the aerospace industry, are inoperative above 600 degrees Celsius due to the unstable mechanical properties of silicon at those temperatures, and are unable to monitor pressure in the hot sections of aircraft engines. We, at Kulite, have initiated a program to develop ultra-high temperature pressure transducers using high temperature semiconductors, namely SiC and Diamond, as sensing elements. The program involves characterization of the materials, development of processing methods and most importantly, the demonstration of a prototype sensor capable of operation at temperatures up to 800 degrees Celsius. These transducers will revolutionize aerospace measurement capability by facilitating proper engine monitoring, enhanced fuel efficiency, and safety.