SBIR/STTR Research Award

X-RAY INSTRUMENTATION FOR IMPROVED SEMICONDUCTOR MANUFACTURING PRODUCTIVITY

Award identifier f710ff2582c54f9827a062e981dc63fff17c898774e55a0ba7a37d91f42542b4Awarding agency National Science Foundation

Award amount

$50,000

Program and phase

SBIR · Phase I

Award year

1988

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Award details

Awarding agency
National Science Foundation
Branch
Not reported
Recipient company
Aracor
Proposal award date
Not reported
Contract end date
Not reported
UEI
Not reported
Solicitation number
Not reported
Topic code
Not reported

Research abstract

N/A

Technology keywords

Not reported

Agency intelligence

National Science Foundation

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