SBIR/STTR Research Award

ELECTRON CYCLOTRON RESONANCE (ECR) SEMICONDUCTOR ETCHING PROCESS CONTROL BY ELLIPSOMETRY

Award identifier a8d4258bd54f293a134d4f5b872e40b8034b35c593aad6b304f61ef6cab29c7cAwarding agency Department of Defense · Army

Award amount

$50,000

Program and phase

SBIR · Phase I

Award year

1992

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Award details

Awarding agency
Department of Defense
Branch
Army
Recipient company
J. A. Woollam Co., Inc.
Proposal award date
Not reported
Contract end date
Not reported
UEI
EYWYMFFL53R6
Solicitation number
Not reported
Topic code
Not reported

Research abstract

N/A

Technology keywords

Not reported

Other awards by this recipient

Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.

Research funding history

13 SBIR/STTR records share this UEI (1992–2009). Reported award amounts total $3,304,849. Reported amounts are not federal obligations.

Phases: Phase I, Phase II

Agencies: Department of Defense, National Aeronautics and Space Administration, National Science Foundation

Agency intelligence

Department of Defense

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