Microelectromechanical Optoelectronic Devices Based on AlOx/GaAlAs

CoreTek proposes to develop a novel micromachined GaA1As dielectric mirror technology with 750 nm bandwidth and apply it to fabricate novel tunable Fabry-Perot filters and Vertical Cavity Surface Emitting Lasers (VCSELs). Relying on the precision of epitaxial growth of III-V materials and selective etching processes, our simple but powerful approach will allow realization of novel tunable filter products with tuning range of over 500nm and linewidth of <1A and low threshold VCSELs with high fabrication yield and low cost. Furthermore, the proposed technology can be adapted for fabrication of tunable VCSELs with 30nm tuning range (entire gain bandwidth). In Phase I we will evaluate the approach by fabricating and testing a widely tunable micromachined Fabry-Perot filter. In Phase II we will (a) optimize and commercialize the tunable Fabry-Perot filter and (b) extent the technology to fabricate tunable and fixed wavelength VCSELs. Anticipated Benefits: Because of low cost and compatibility with standard semiconductor technologies our proposed micromachined tunable lasers and filters promise a key role in a wide range of specific applications such as wideband communication fiberoptic networks, spectroscopic applications in laboratories, medicine, environmental monitoring, fiberoptic switching etc. If successful, our technology can be applied to such applications generating annual revenues in the range of tens of millions of dollars at the component level.