SBIR/STTR Research Award

LASER MICROCHEMICAL PROCESSING INSTRUMENT

Award identifier d515b828b530326cfec29e3a712ba58c951129fb3f0ba240a7b42349113167d1Awarding agency Department of Defense · Air Force

Award amount

$329,160

Program and phase

SBIR · Phase II

Award year

1992

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Award details

Awarding agency
Department of Defense
Branch
Air Force
Recipient company
Ehrlich Associates
Proposal award date
Not reported
Contract end date
Not reported
UEI
Not reported
Solicitation number
Not reported
Topic code
Not reported

Research abstract

THE OBJECT IS TO DEVELOP A DETAILED DESIGN FOR A LASER INSTRUMENT TO CONTROL AND MONITOR MICROCHEMICAL PROCESSING OF SEMICONDUCTOR DEVICES. ???????????

Technology keywords

Not reported

Agency intelligence

Department of Defense

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