X-Y Translation Using Terfenol-D and a High Resolution Capacitive Sensor

A fast, high accuracy X-Y translation table has been identified as desirable for nano lithography instruments. Over a wafer size of 3"x3", the translation table has to localize to a 20x20 um zone, and within this zone have a positioning accuracy better than 10 nanometers with a sweep speed of 20 um/sec. It is perceived as a two-step positioning problem, slow long range, fast and accurate shorter range servo. Phase I concentrates on designing a fast 2 nanometer resolution X-Y positioning mechanism for the 20x20 um zone. This mechanism will be incorporated into a slower 3"x3" X-Y translational table at a later stage. The key to fast, accurate positioning is a fast actuator and a sensor with high handwidth, accuracy and signal/noise ration. A Terfenol-D based translational actuator together with a 915 MHz capacitive sensor fulfill these requirements adequately. The proposal outlines a Phase I program to design a X-Y translation mechanism and to provide experimental proof of concept by demonstrating a one-degree-of-freedom servo system. Phase I will pave the way for full development of a prototype instrument in a Phase II program and commercialization in Phase III.