Implantable Microelectrodes Using CVD Thin-film Bati03

There is a great deal of interest in implantable stimulation electrodes for use in neural prostheses. Such devices would be used to stimulate non-functional neural pathways to allow the recipient to regain control of muscles or improve optic and aural sensory input. Development of these devices has been hampered by the lack of a suitable electrode material. We will develop a process for depositing thin films of barium titanate by chemical vapor deposition for this purpose. This material is eminently suited for the envisioned application due to its high dielectric constant and biocompatability. We will develop a novel organo-barium precursor for this purpose which will allow for the deposition of pure, crystalline defect free films at temperatures that are compatible with device fabrication.