SBIR/STTR Research Award
Gate Oxide Screening Methodology and Surface Smoothing for Advanced SOI Space System Applications
Award amount
$99,978Program and phase
SBIR · Phase IAward year
1999Award details
- Awarding agency
- Department of Defense
- Branch
- Air Force
- Recipient company
- Epion Corporation
- Proposal award date
- Not reported
- Contract end date
- Not reported
- UEI
- Not reported
- Solicitation number
- Not reported
- Topic code
- Not reported
Research abstract
N/A
Technology keywords
Not reported