SBIR/STTR Research Award
MBE Thin Film Formation Using Nitrogen Source
Award amount
$59,953Program and phase
SBIR · Phase IAward year
1995Award details
- Awarding agency
- Department of Defense
- Branch
- Missile Defense Agency
- Recipient company
- IONWERKS INC
- Proposal award date
- Not reported
- Contract end date
- Not reported
- UEI
- XFHSJJLN7ZQ7
- Solicitation number
- Not reported
- Topic code
- Not reported
Research abstract
A novel nitrogen beam source will provide 5 eV atomic and molecular nitrogen to a 0.5 cm diameter circle with a flux of 10(21)/cm(2)/sec. Larger areas can be irradiated with a lower flux (eg. 10(18)/cm(2)/sec over a 2" diameter wafer). The technique will put minimal gas load into the chamber so it will be compatible with ion pumped MBE systems. The source will be used in an attempt to synthesize crystalline cBN and InGaN thin films. Nitrides in thin film form are potentially commercializable. The sale of the atom source as an add-on to thin film deposition systems is directly commercializable even after Phase I. The source may be particularly appropriate for wide bandgap nitride synthesis.
Technology keywords
Not reported
Other awards by this recipient
Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.
- Nanoparticulate Coatings Enhance Ion Detection
- Diode lasers and Small Nanoparticulate Matrices Combine to Elevate Sensitivity of MILDI-MSI
- Miniature Recoil Ion Mass Spectrometer enables correlative elemental isotopic and backscatter analysis from solid nanovolumes
- Nanoparticulate Coatings Enhance Ion Detection
- Gas Phase Synthesis and Implantation of Metastable Intermolecular Compounds (MICs)
Research funding history
65 SBIR/STTR records share this UEI (1986–2021). Reported award amounts total $17,405,049. Reported amounts are not federal obligations.
Phases: Phase I, Phase II
Agencies: Department of Health and Human Services, Department of Defense, National Aeronautics and Space Administration, Department of Energy, National Science Foundation