SBIR/STTR Research Award

HIGH THROUGHPUT HIGH YIELD PLASMA MACHINES FOR MANUFACTURING AMLCDS

Award identifier f81eef4c85695b6e57872d9ec0c905136b61b16f90c8e558cf96c00a83583006Awarding agency Department of Defense · Defense Advanced Research Projects Agency

Award amount

$50,000

Program and phase

SBIR · Phase I

Award year

1990

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Award details

Awarding agency
Department of Defense
Branch
Defense Advanced Research Projects Agency
Recipient company
Ois Optical Imaging Sys Inc
Proposal award date
Not reported
Contract end date
Not reported
UEI
Not reported
Solicitation number
Not reported
Topic code
Not reported

Research abstract

N/A

Technology keywords

Not reported

Agency intelligence

Department of Defense

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