Validated Simulation Tools for Plasma Reactor Synthesis

Plasma assisted processing techniques are widely used in many industries to synthesize materials at low process temperatures. Stringent precision requirements for devices and the demand for low cost manufacturing techniques emphasize the need for optimizing plasma reactors. Numerical simulation offers a quick and inexpensive alternative/supplement (to hardware experimentation) for designing new and optimized plasma systems. Phase I of this study will involve the development of a simulation tool to model plasma enhanced chemistry and particulate nucleation/transport in plasma reactors. These models will be incorporated into an existing Computational Fluid Dynamics (CFD) code capable of solving multi-component fluid flow, heat/mass transfer, and gas/surface chemistry in complex reactor configurations. The coupled model will facilitate the detailed simulation of practical plasma reactors. CFDRC will avail the assistance/guidance of the Plasma/Process Technology group at SEMI/SEMATECH during Phase I. The models will be further refined and validated against benchmark experiments in Phase II. The validated model will be demonstrated on a PECVD reactor to optimize process efficiency and uniformity. During Phase III commercialization, the simulation tools will be made available to members of SEMATECH and the semiconductor industry for further testing and application. Anticipated Benefits/Potential Applications - A validated simulation tool for plasma reactors will facilitate the optimization of plasma systems during the development phase. The use of this tool will reduce design cycle times (and costs) , improve the time-to-market, and allow the industry to adapt quickly to new designs and requirements. All of this will enhance the competitive position of the semiconductor industry.