Low cost fabrication of pyroelectric thin films and novel structures for IR sensors by combustion CVD

"Infrared (IR) sensors are required for military and commercial applications such as human body recognition, non-contact temperature detection, and image sensing. The U.S. infrared market is growing rapidly and the market would benefit greatly with furtherreduction in cost, size, weight and power consumption. Also, integrated devices and systems compatible with typical semiconductor process are becoming more and more needed. Hence, pyroelectric thin film based infrared sensors are being targeted fordevelopment and properties such as high sensitivity, low noise, low power consumption and smaller size. In this Phase I effort, we will utilize the innovative, low-cost, Combustion Chemical Vapor Deposition (CCVD) process to deposit dense, texturedpyroelectric thin films including multiplayer structures on single crystal substrates. Deposited coatings will be characterized for their chemical, dielectric, and pyroelectric properties. Successful accomplishment of Phase I will lead to a follow-onPhase II effort where further development and commercialization of sensors will take place. The IR sensor market was estimated to be over $1.3 billion in 2001. Successful development of the CCVD technology will result in cost effective fabrication ofintegrated IR sensors and fulfill the industry's need of low cost, low power consumption and high performance infrared devices in the very near future. If MicroCoating Technologies triumphs in its produc