Non-volatile Semiconductor Memories

NON-VOLATILE SEMICONDUCTOR MEMORIES FOR RADIATION ENVIRONMENTS CAN BENEFIT FROM ADVANCED ELECTRONIC MATERIALS. WE PROPOSE TO INVESTIGATE SOME NOVEL MATERIALS FOR APPLICATION TO NON-VOLATILE SEMICONDUCTOR MEMORIES WHICH COULD IMPROVE PERFORMANCE IN RADIATION ENVIRONMENTS. IN PHASE I, WE WILL ATTEMPT TO DEVELOP TWO METHODS OF DEPOSITING THIN FILMS OF THESE NOVEL MATERIALS, CHARACTERIZE THE DEPOSITED FILMS, OPTIMIZE THE DEPOSITION METHODS, FABRICATE CAPACITORS FROM THE THIN FILMS, AND DO PRELIMINARY CHARACTERIZATION OF THE CAPACITORS. DETAILED CHARACTERIZATION OF CAPACITORS OF THESE MATERIALS WOULD BE PERFORMED IN PHASE II.