SBIR/STTR Research Award

HIGH BRIGHTNESS X-RAY SOURCES FOR X-RAY LITHOGRAPHY

Award identifier 1f489294b0cbaafdefb6ab96ce732486837bf942e9ff5b92272ce1c3ad2afc9cAwarding agency Department of Defense · Defense Advanced Research Projects Agency

Award amount

$51,411

Program and phase

SBIR · Phase I

Award year

1990

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Award details

Awarding agency
Department of Defense
Branch
Defense Advanced Research Projects Agency
Recipient company
Medox Electro-optics Inc.
Proposal award date
Not reported
Contract end date
Not reported
UEI
Not reported
Solicitation number
Not reported
Topic code
Not reported

Research abstract

N/A

Technology keywords

Not reported

Agency intelligence

Department of Defense

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