SBIR/STTR Research Award
Single Crystal Diamond Films
Award amount
$62,564Program and phase
SBIR · Phase IAward year
1992Award details
- Awarding agency
- Department of Defense
- Branch
- Missile Defense Agency
- Recipient company
- Implant Sciences Corporation
- Proposal award date
- Not reported
- Contract end date
- Not reported
- UEI
- Not reported
- Solicitation number
- Not reported
- Topic code
- Not reported
Research abstract
Diamond films are important for radiation tolerent devices. However, fabrication of single crystal films has proven to be much more difficult than polycrystalline deposits. A novel deposition process is proposed which can be used to deposit diamond on a seed crystal. The technique permits patterned deposits in island and offers the potential of a new method for attempting to dope diamond semiconductors. Diamond films offer the highest radiation resistance of any semiconductor material and are thus important for military and space applications. The problems of fabrication of single crystal diamond films have not yet been solved. If this work is successful, a major materials limitation will have been resolved.
Technology keywords
Not reported